Lithographic apparatus

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August undefined, 2024

WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion at one time, and so-called … WebA lithographic apparatus has a positioning system for positioning an object table, said positioning system comprising a planar motor having a stator (10) and a translator …

Systems and Methods for Lithographic Illuminator Beam Deviation ...

Web7656502 - 11472566 - USPTO . Application Jun 22, 2006 - Publication Feb 02, 2010 Harmen Klaus Van Der Schoot Noud Jan Gilissen Peter Paul Steijaert Erik Roelof … Web9 jul. 2009 · Abstract. A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes … rbs customer login

Lithographic Apparatus And Device Manufacturing Method

WebA lithographic apparatus is described, the lithographic apparatus comprising: an illumination system configured to condition a radiation beam; a support constructed to … WebA lithographic apparatus is a machine that applies a desired pattern onto a target portion of a substrate. Lithographic apparatus can be used, for example, in the manufacture of … Web14 jun. 2007 · [0002] A lithographic apparatus is a machine that applies a desired pattern onto a substrate, usually onto a target portion of the substrate. A lithographic … rbs crewe

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Lithographic apparatus and positioning apparatus (2006) Marcel ...

Web2 sep. 2024 · G03F7/00 — Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; G03F7/0002 — Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called scanners, in which each target portion is irradiated by scanning the pattern through the projection beam in a given direction (the “scanning”-direction) while synchronously … rbs customerservice.nsw.gov.auWebA chamber for a projection system of a lithographic apparatus is described, the chamber comprising:- an opening configured to enable, during use, a patterned radiation beam to be projected onto a substrate that is arranged outside the chamber;- a conduit having an … sims 4 family bulletin board

"Web29 nov. 2012 · The lithographic apparatus component of claim 2, wherein the lithographic apparatus component is a projection system wall, a substrate table, a mirror, a heat sink … " - Lithographic apparatus

Lithographic apparatus

WebJP-2004006690-A chemical patent summary. WebIn a lithographic apparatus, a feedforward transfer function of a control system, is determined by: a) iteratively learning a feedforward output signal of the control system by …

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Web6 apr. 2001 · On-the-Fly leveling in a lithographic apparatus is conducted using a setpoint derived by filtering the output of the combination of the output of a level sensor and … Web23 mei 2005 · Abstract: A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first …

Web31 jan. 2024 · Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it should be understood that the … WebThe present invention has particular, but not exclusive, use in connection with EUV lithographic apparatus and EUV lithographic tools. See patent.

WebTo provide an improved conduit system, the lithographic apparatus further includes a control system which is used to control the movement of the object based on … Web27 nov. 2024 · The lithographic apparatus further includes a control unit 120 which controls all the movements and measurements of the various actuators and sensors …

WebA lithographic apparatus is provided that includes an illumination system for conditioning a beam of radiation, and a support for supporting a patterning device. The patterning …

Web1. A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate and along a beam path in the space, the apparatus comprising: a liquid confinement structure configured to at least partly confine the liquid in the space, the liquid confinement structure having, a liquid … rb scythe\\u0027sWebPURPOSE: A lithographic apparatus is provided to decrease the sensitivity to the effects of collision in a horizontal plane and to reduce the damage caused by such a collision. … rbs cyclery brentwoodWebThe lithographic apparatus further comprises a lens for projecting radiation beam at the patterning device with a magnification of between 0.5× and 2×, a substrate table … sims 4 family cottageWebAn immersion lithographic apparatus includes: a projection system for projecting a patterned beam of radiation through an optical element of a final lens element of a … sims 4 family buildsWebIn a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas … sims 4 familien pinnwandWeb5 okt. 2004 · Lithographic apparatus and position measuring method. Cite. Download. Patent: US-7310130-B2: Inventor: EUSSEN EMIEL JOZEF MELANIE (NL) VAN-EMPEL … sims 4 family funds sims 4 familienfoto machen